Invention Grant
- Patent Title: Asymmetric channel threshold voltage
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Application No.: US16420118Application Date: 2019-05-22
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Publication No.: US11024740B2Publication Date: 2021-06-01
- Inventor: Choonghyun Lee , Takashi Ando , Alexander Reznicek , Jingyun Zhang , Pouya Hashemi
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Lou Percello, Attorney, PLLC
- Agent Erik K. Johnson
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/161 ; H01L29/66 ; H01L21/84 ; H01L29/10 ; H01L21/02 ; H01L21/324 ; H01L27/12

Abstract:
A SiGe channel FinFET structure has an asymmetric threshold voltage, Vth, laterally along the SiGe channel. Uses of sacrificial layers, selective Ge condensation, and/or the use of spacers enable precise creation of first and second channel regions with different Ge concentration, even for channels with short lengths. The second channel region near the source side of the device is modified with a selective Germanium (Ge) condensation to have a higher Vth than the first channel region near the drain side. A lateral electric field is created in the channel to enhance carrier mobility.
Public/Granted literature
- US20200373429A1 ASYMMETRIC CHANNEL THRESHOLD VOLTAGE Public/Granted day:2020-11-26
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