Invention Grant
- Patent Title: Magnetically microfocused electron emission source
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Application No.: US16450242Application Date: 2019-06-24
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Publication No.: US11037753B2Publication Date: 2021-06-15
- Inventor: Christopher Sears
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J37/143
- IPC: H01J37/143 ; H01J3/24 ; H01J3/02 ; H01J37/28

Abstract:
A magnetically microfocused electron emission source apparatus is disclosed. The apparatus may include a magnetic emitter unit, wherein the magnetic emitter unit comprises an emitter. Further, the magnetic emitter unit may include one or more magnetic portions formed from one or more magnetic materials, wherein the one or more magnetic portions of the magnetic emitter unit are configured to generate a magnetic field proximate to a tip of the emitter of the magnetic emitter unit for enhancing focusing of the emitted electrons from the electron emitter.
Public/Granted literature
- US20200013579A1 Magnetically Microfocused Electron Emission Source Public/Granted day:2020-01-09
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