- 专利标题: Plating apparatus and plating method
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申请号: US16373456申请日: 2019-04-02
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公开(公告)号: US11047063B2公开(公告)日: 2021-06-29
- 发明人: Jumpei Fujikata , Masashi Shimoyama , Yoichi Nakagawa , Yoshitaka Mukaiyama , Yoshio Minami
- 申请人: EBARA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: BakerHostetler
- 优先权: JPJP2014-235906 20141120
- 主分类号: C25D17/00
- IPC分类号: C25D17/00 ; C25D5/02 ; C25D17/06 ; C25D17/10
摘要:
A plating apparatus according to the present disclosure includes an anode holder configured to hold an anode; a substrate holder placed opposite the anode holder and configured to hold a substrate; and an anode mask installed on a front face of the anode holder and provided with a first opening adapted to allow passage of an electric current flowing between an anode and the substrate. The diameter of the first opening in the anode mask is configured to be adjustable. When a first substrate is plated, a diameter of the first opening is adjusted to a first diameter. When a second substrate is plated, the diameter of the first opening is adjusted to a second diameter smaller than the first diameter.
公开/授权文献
- US20190226114A1 PLATING APPARATUS AND PLATING METHOD 公开/授权日:2019-07-25
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