Invention Grant
- Patent Title: Micromechanical pressure sensor
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Application No.: US16488470Application Date: 2018-02-21
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Publication No.: US11060937B2Publication Date: 2021-07-13
- Inventor: Ferenc Lukacs , Arne Dannenberg , Friedjof Heuck , Helmut Grutzeck , Mike Schwarz , Robert Maul , Tamas Dögei , Thomas Friedrich , Volkmar Senz
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102017203384.3 20170302
- International Application: PCT/EP2018/054200 WO 20180221
- International Announcement: WO2018/158116 WO 20180907
- Main IPC: G01L19/14
- IPC: G01L19/14 ; G01L19/06 ; G01L9/06 ; G01L9/00 ; G01L19/00

Abstract:
A micromechanical pressure sensor, having—a pressure sensor core including a sensor diaphragm and a cavity developed above the sensor diaphragm; and—a pressure sensor frame; and—a spring element for the mechanical connection of the pressure sensor core to the pressure sensor frame being developed in such a way that a mechanical robustness is maximized and a coupling of stress from the pressure sensor frame into the sensor pressure core is minimized.
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