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公开(公告)号：US20250030987A1
公开(公告)日：2025-01-23
申请号：US18772471
申请日：2024-07-15
Applicant: Robert Bosch GmbH
Inventor： Jochen Reinmuth , Thomas Friedrich
Abstract: A microelectromechanical device for capacitive fluid pressure measurement. The device has a first membrane and a second membrane which can be elastically deflected by a fluid pressure, wherein a cavity is formed between the first membrane and the second membrane, in which cavity a counter electrode is arranged, wherein the counter electrode has a plurality of radial etch channels which extend radially from the center of the counter electrode to an edge of the counter electrode. A microelectromechanical microphone, and a method for producing a microelectromechanical device, are also described.
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公开(公告)号：US12030773B2
公开(公告)日：2024-07-09
申请号：US17265451
申请日：2019-09-24
Applicant: Robert Bosch GmbH
Inventor： Friedjof Heuck , Jochen Tomaschko , Peter Schmollngruber , Thomas Friedrich , Volkmar Senz , Franziska Rohlfing
CPC classification number: B81C1/00238 , B81B7/0006 , G01L9/0041 , B81B2201/0264 , B81B2207/012 , B81B2207/07 , B81C2203/035 , B81C2203/0792
Abstract: A method for producing a wafer connection between a first and a second wafer. The method includes providing a first and second material for forming a eutectic alloy, providing a first wafer having a receiving structure for a die structure, filling the receiving structure with the first material, providing a second wafer having a die structure, the second material being situated on the die structure, providing a stop structure on the first and/or second wafer, so that when the two wafers are joined, a defined stop is provided, heating the first and second material at least to the eutectic temperature of the eutectic alloy, joining the first and second wafer so that the die structure is at least partly introduced into the receiving structure, the stop structure, the receiving structure, the die structure.
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公开(公告)号：US11981304B2
公开(公告)日：2024-05-14
申请号：US17046239
申请日：2019-04-05
Applicant: Robert Bosch GmbH
Inventor： Thomas Friedrich , Dirk Drotleff , Ralf Kleemann , Daniel Brenndoerfer , Bernd Hienz
CPC classification number: B60T13/148 , B60T8/885 , B60T13/686
Abstract: A multi-circuit, hydraulically open brake system includes a first pressure generator assigned to a main system with a first energy supply and a first evaluation and control unit (ECU), and is connectable via a first shut-off valve to wheel brake(s) of a first brake circuit and via a second shut-off valve to wheel brake(s) of a second brake circuit. A second pressure generator is assigned to a secondary system which includes a second energy supply and a second ECU, and is connectable via a third shut-off valve to wheel brake(s) of the first brake circuit and via a fourth shut-off valve to wheel brake(s) of the second brake circuit. The second ECU controls the second pressure generator. Components of the modulation unit for individual brake pressure modulation are assigned to the main system, and the components are controlled by the first ECU and are supplied by the first energy supply.
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公开(公告)号：US11976996B2
公开(公告)日：2024-05-07
申请号：US17282736
申请日：2019-12-18
Applicant: Robert Bosch GmbH
Inventor： Thomas Friedrich , Christoph Hermes , Hans Artmann , Heribert Weber , Peter Schmollngruber , Volkmar Senz
CPC classification number: G01L9/0073 , B81B7/02 , G01L7/082 , G01L9/0048 , B81B2201/0264
Abstract: A micromechanical component for a capacitive pressure sensor device, including a diaphragm that is stretched with the aid of a frame structure in such a way that a cantilevered area of the diaphragm spans a framed partial surface, and including a reinforcement structure that is formed at the cantilevered area. A first spatial direction oriented in parallel to the framed partial surface is definable in which the cantilevered area has a minimal extension, and a second spatial direction oriented in parallel to the framed partial surface and oriented perpendicularly with respect to the first spatial direction is definable in which the cantilevered area has a greater extension. The reinforcement structure is present at a first distance from the frame structure in the first spatial direction, and at a second distance in the second spatial direction, the second distance being greater than the first distance.
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公开(公告)号：US11940346B2
公开(公告)日：2024-03-26
申请号：US17291244
申请日：2019-12-13
Applicant: Robert Bosch GmbH
Inventor： Johannes Meckbach , Thomas Friedrich
CPC classification number: G01L9/0073 , B81B3/0078 , B81B2201/0264 , B81B2203/0127
Abstract: A micromechanical pressure sensor device including a semiconductor base substrate of a first doping type on which an intermediate layer of the first doping type is situated, a cavity sealed by a sealing layer of a second doping type and including a reference pressure, a first grating of the second doping type, suspended inside the cavity on a buried connection region of the second doping type, the buried connection region laterally extending away from the cavity into the semiconductor base material, a second grating of the second doping type, situated on a side of the diaphragm region pointing to the cavity and suspended on the diaphragm region, the first grating and the second grating being electrically insulated from each other and forming a capacitance, a first connection electrically connected to the first grating via the buried connection region, and a second connection electrically connected to the second grating.
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Patent Agency Ranking
公开(公告)号：US11912563B2
公开(公告)日：2024-02-27
申请号：US17287389
申请日：2019-12-13
Applicant: Robert Bosch GmbH
Inventor： Hans Artmann , Christoph Hermes , Heribert Weber , Jochen Reinmuth , Peter Schmollngruber , Thomas Friedrich
CPC classification number: B81B3/0072 , B81C1/00158 , G01L7/082 , G01L9/0072 , B81B2201/0264 , B81B2203/0127 , B81B2203/0307 , B81C2201/0101
Abstract: A micromechanical component, whose diaphragm is supported and has support structures on its inner diaphragm side. Each of the support structures includes a first and second edge element structure, and at least one intermediate element structure positioned between the first and second edge element structures. For each of the support structures, a plane of symmetry is definable, with respect to which at least the first edge element structure of the respective support structure and the second edge element structure of the respective support structure are specularly symmetric. In each of support structures, a first maximum dimension of its first edge element structure perpendicular to its plane of symmetry and a second maximum dimension of its second edge element structure perpendicular to its plane of symmetry are greater than the maximum dimension of its intermediate element structure perpendicular to its plane of symmetry.
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公开(公告)号：US20220002147A1
公开(公告)日：2022-01-06
申请号：US17291251
申请日：2019-12-13
Applicant: Robert Bosch GmbH
Inventor： Christoph Hermes , Hans Artmann , Heribert Weber , Peter Schmollngruber , Thomas Friedrich , Tobias Joachim Menold , Mawuli Ametowobla
IPC: B81C1/00
Abstract: A method for sealing entries in a MEMS element. The method includes: providing a functional layer having a functional region; producing a cavity underneath the functional region of the functional layer with the aid of a first entry outside of the functional region of the functional layer; sealing the first entry; producing a second entry to the cavity outside of the functional region of the functional layer; melting sealing material in the region of the second entry; and cooling off the melted sealing material to seal the second entry.
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公开(公告)号：US10914675B2
公开(公告)日：2021-02-09
申请号：US15740477
申请日：2016-05-25
Applicant: Robert Bosch GmbH
Inventor： Mike Schwarz , Thomas Friedrich , Timon Brueckner
Abstract: A sensor apparatus having a sensor unit. The sensor unit including pixel assemblages on a substrate upper side of a substrate located on a lower side of the sensor unit; a cap, on the substrate upper side, which covers the pixel assemblages, a cavity being formed between the substrate upper side and the cap; a plurality of filters that are transparent to wavelength regions that differ from one another, exactly one pixel assemblage being associated with each filter; and the filters being on the cap so that the infrared radiation propagated through an absorption gap of the sensor apparatus and the upper side of the sensor unit is detectable, through the respective filter, by the pixel assemblage associated with the respective filter; and a coating made of a light-absorbing and/or light-reflecting material being configured at least locally on a part of the cap which is not covered by the filters.
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公开(公告)号：US10773695B2
公开(公告)日：2020-09-15
申请号：US15982843
申请日：2018-05-17
Applicant: Robert Bosch GmbH
Inventor： Fanny Palomba , Horst Beling , Thomas Friedrich , Vaclav Kocourek
Abstract: An electronically pressure-controllable braking system and methods for controlling an electronically pressure-controllable braking system. Each wheel brake of the braking system is connected respectively to at least two brake circuits, pump units and valve devices of one brake circuit are operable respectively independently of the pump units and the valve devices of the respective other brake circuit. This provides a cost-effectively and compactly designed redundant braking system, which is suitable for use in autonomously, i.e., driverlessly drivable, motor vehicles.
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公开(公告)号：US20200220445A1
公开(公告)日：2020-07-09
申请号：US16637891
申请日：2018-06-14
Applicant: Robert Bosch GmbH
Inventor： Rico Alf Klein , Vaclav Kocourek , Thomas Friedrich
Abstract: A hydraulic actuator device for a hydraulic system filled with an electrically conductive medium, the hydraulic actuator device being situatable or being situated on and/or in the hydraulic system, and including at least one actuator module, which in each case is designed in such a way that at least a portion of the electrically conductive medium is acceleratable into at least one partial volume of the hydraulic system due to its interaction with an electrical current flow generated with the aid of the respective actuator module and/or with a magnetic field created with the aid of the respective actuator module, as a result of which a pressure build-up is creatable in the at least one partial volume of the hydraulic system.
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