- 专利标题: Semiconductor device, method for manufacturing the same, and electronic device
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申请号: US16133814申请日: 2018-09-18
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公开(公告)号: US11075300B2公开(公告)日: 2021-07-27
- 发明人: Shunpei Yamazaki , Shinpei Matsuda
- 申请人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 申请人地址: JP Atsugi
- 专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人地址: JP Atsugi
- 代理机构: Fish & Richardson P.C.
- 优先权: JP2015-063779 20150326
- 主分类号: H01L29/12
- IPC分类号: H01L29/12 ; H01L29/786 ; H01L29/04 ; H01L29/24 ; H01L29/66
摘要:
The semiconductor device includes a first insulating layer; a first oxide semiconductor; a first insulator containing indium, an element M (M is gallium, aluminum, titanium, yttrium, or tin), and zinc; a second oxide semiconductor; a source electrode layer; a drain electrode layer; a second insulator containing indium, the element M, and zinc; a gate insulating layer; and a gate electrode layer. The first and second oxide semiconductors each include a region with c-axis alignment. In the first and second oxide semiconductors, the number of indium atoms divided by sum of numbers of the indium atoms, element M atoms, and zinc atoms is ⅓ or more. In the first insulator, the number of zinc atoms divided by sum of the numbers of indium atoms, element M atoms, and zinc atoms is ⅓ or less.
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