Invention Grant
- Patent Title: Power rail with non-linear edge
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Application No.: US16659305Application Date: 2019-10-21
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Publication No.: US11093684B2Publication Date: 2021-08-17
- Inventor: Jung-Chan Yang , Ting-Wei Chiang , Hui-Zhong Zhuang , Chi-Yu Lu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: G06F30/00
- IPC: G06F30/00 ; G06F30/398 ; G03F1/70 ; G03F1/36 ; G06F30/30 ; G06F30/3953 ; G06F119/18

Abstract:
A method for designing an integrated circuit includes steps of selecting a power rail of a cell, determining that a clearance distance for an electrical connection to or around the power rail is not sufficient to fit the electrical connection, selecting a power rail portion of the power rail for modification, and modifying a shape of the power rail portion to provide a clearance distance sufficient to fit the electrical connection. As clearance distances between features in an interconnection structure of an integrated circuit become smaller, manufacturing becomes more difficult and error-prone. Increasing clearance distances improves manufacturability of an integrated circuit. Modifying the shape of an integrated circuit power rail increases clearance distance to and/or around a power rail.
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