发明授权
- 专利标题: Profile of deep trench isolation structure for isolation of high-voltage devices
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申请号: US16807632申请日: 2020-03-03
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公开(公告)号: US11101168B2公开(公告)日: 2021-08-24
- 发明人: Hung-Ling Shih
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L21/70
- IPC分类号: H01L21/70 ; H01L21/762 ; H01L23/522 ; H01L21/768 ; H01L23/532
摘要:
In some embodiments, the present disclosure relates to an integrated chip that includes a silicon-on-insulator (SOI) substrate having an insulator layer between an active layer and a base layer. A semiconductor device and a shallow trench isolation (SIT) structure are disposed on a frontside of the SOI substrate. A semiconductor core structure continuously surrounds the semiconductor device and extends through the STI structure and towards a backside of the SOI substrate. A first insulator liner portion and a second insulator liner portion surround a first outermost sidewall and a second outermost sidewall of the semiconductor core structure. The first and second insulator liner portions respectively have a first protrusion and a second protrusion. The first and second protrusions are arranged between the STI structure and the insulator layer of the SOI substrate.
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