- 专利标题: Methods for manufacturing a memory array having strings of memory cells comprising forming bridge material between memory blocks
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申请号: US16664618申请日: 2019-10-25
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公开(公告)号: US11101210B2公开(公告)日: 2021-08-24
- 发明人: Yi Hu , Harsh Narendrakumar Jain , Matthew J. King
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/11556 ; H01L27/1157 ; H01L27/11524 ; H01L21/311 ; H01L21/762 ; H01L23/522 ; H01L23/528
摘要:
A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Intervening material is laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The intervening material comprises longitudinally-alternating first and second regions that individually have a vertically-elongated seam therein. The vertically-elongated seam in the first regions has a higher top than in the second regions. The seam tops in the second regions are elevationally-coincident with or below a bottom of an uppermost of the conductive tiers. Methods are disclosed.
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