- 专利标题: Fluidic pick-up head for assembling light emitting diodes
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申请号: US16700354申请日: 2019-12-02
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公开(公告)号: US11107948B1公开(公告)日: 2021-08-31
- 发明人: Yigit Menguc , Pooya Saketi , Thomas John Farrell Wallin , Nicholas Roy Corson , Ali Sengül , Katherine Healy , Oscar Torrents Abad , Daniel Brodoceanu , Robert Manson , Leif-Erik Sharif Simonsen , Remi Alain Delille
- 申请人: Facebook Technologies, LLC
- 申请人地址: US CA Menlo Park
- 专利权人: Facebook Technologies, LLC
- 当前专利权人: Facebook Technologies, LLC
- 当前专利权人地址: US CA Menlo Park
- 代理机构: Fenwick & West LLP
- 主分类号: H01L33/06
- IPC分类号: H01L33/06 ; H01L25/075 ; H01L21/683
摘要:
A method and system for assembling a device by picking up semiconductor devices from a carrier substrate and placing the semiconductor devices onto a target substrate. The transfer of the semiconductor devices uses fluid as a transfer medium. The fluid enters a fluid channel of a pickup head, causing the pickup head to expand, make contact with, and attach to an aligned semiconductor device. After the semiconductor device is aligned with and placed onto the target substrate, at least a portion of the fluid is removed from the pickup head to release the semiconductor device onto the target substrate. The semiconductor device bonds to the target substrate.
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