Invention Grant
- Patent Title: MEMS microphone
-
Application No.: US16609194Application Date: 2017-05-05
-
Publication No.: US11109162B2Publication Date: 2021-08-31
- Inventor: Quanbo Zou , Zhe Wang , Jialiang Yan
- Applicant: GOERTEK INC.
- Applicant Address: CN Shandong
- Assignee: GOERTEK INC.
- Current Assignee: GOERTEK INC.
- Current Assignee Address: CN Shandong
- Agency: LKGlobal | Lorenz & Kopf, LLP
- International Application: PCT/CN2017/083306 WO 20170505
- International Announcement: WO2018/201471 WO 20181108
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B7/00 ; H04R1/04 ; H04R19/00

Abstract:
A MEMS microphone, comprising a packaging structure that is enveloped by a PCB substrate (1) and a housing (2), wherein the packaging structure is provided with a MEMS acoustoelectric chip (3) therein, and the PCB substrate (1) is provided with a sound port (11) at a position that is corresponding to the MEMS acoustoelectric chip (3), wherein, the MEMS microphone further comprises a filter (5), wherein the filter (5) is embedded into a back cavity of the MEMS acoustoelectric chip (3), the filter (5) and the PCB substrate (1) have a lateral hole therebetween, and the lateral hole serves as a sound channel that is used by the MEMS acoustoelectric chip (3) to gather sound. The MEMS microphone can prevent gas shock, block the interfering to the MEMS microphone by kinetic particles, keep the acoustic performance of the MEMS microphone, and reduce the packaging size of the MEMS microphone.
Public/Granted literature
- US20200092658A1 MEMS MICROPHONE Public/Granted day:2020-03-19
Information query