发明授权
- 专利标题: MEMS microphone
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申请号: US16609194申请日: 2017-05-05
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公开(公告)号: US11109162B2公开(公告)日: 2021-08-31
- 发明人: Quanbo Zou , Zhe Wang , Jialiang Yan
- 申请人: GOERTEK INC.
- 申请人地址: CN Shandong
- 专利权人: GOERTEK INC.
- 当前专利权人: GOERTEK INC.
- 当前专利权人地址: CN Shandong
- 代理机构: LKGlobal | Lorenz & Kopf, LLP
- 国际申请: PCT/CN2017/083306 WO 20170505
- 国际公布: WO2018/201471 WO 20181108
- 主分类号: H04R19/04
- IPC分类号: H04R19/04 ; B81B7/00 ; H04R1/04 ; H04R19/00
摘要:
A MEMS microphone, comprising a packaging structure that is enveloped by a PCB substrate (1) and a housing (2), wherein the packaging structure is provided with a MEMS acoustoelectric chip (3) therein, and the PCB substrate (1) is provided with a sound port (11) at a position that is corresponding to the MEMS acoustoelectric chip (3), wherein, the MEMS microphone further comprises a filter (5), wherein the filter (5) is embedded into a back cavity of the MEMS acoustoelectric chip (3), the filter (5) and the PCB substrate (1) have a lateral hole therebetween, and the lateral hole serves as a sound channel that is used by the MEMS acoustoelectric chip (3) to gather sound. The MEMS microphone can prevent gas shock, block the interfering to the MEMS microphone by kinetic particles, keep the acoustic performance of the MEMS microphone, and reduce the packaging size of the MEMS microphone.
公开/授权文献
- US20200092658A1 MEMS MICROPHONE 公开/授权日:2020-03-19
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