Invention Grant
- Patent Title: In-situ optical chamber surface and process sensor
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Application No.: US16378271Application Date: 2019-04-08
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Publication No.: US11114286B2Publication Date: 2021-09-07
- Inventor: Chuang-Chia Lin , Upendra Ummethala , Steven E. Babayan , Lei Lian
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/22 ; G01J3/443 ; G01J3/02 ; G01J3/28

Abstract:
Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.
Public/Granted literature
- US20200321201A1 IN-SITU OPTICAL CHAMBER SURFACE AND PROCESS SENSOR Public/Granted day:2020-10-08
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