Invention Grant
- Patent Title: Method for preparing ultrathin two-dimensional nanosheets and applications thereof
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Application No.: US16905995Application Date: 2020-06-19
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Publication No.: US11114579B2Publication Date: 2021-09-07
- Inventor: Jie Xiong , Chuanhui Gong , Yang Wang , Gaofeng Rao , Chujun Yin , Chaoyi Yan , Junwei Chu , Jianwen Huang , Miao Zhang , Xinrui Chen , Yuqing Liu , Chunyang Wu , Xianfu Wang , Liping Dai , Wanli Zhang , Yanrong Li
- Applicant: University of Electronic Science and Technology of China
- Applicant Address: CN Chengdu
- Assignee: University of Electronic Science and Technology of China
- Current Assignee: University of Electronic Science and Technology of China
- Current Assignee Address: CN Chengdu
- Agency: Matthias Scholl P.C.
- Agent Matthias Scholl
- Priority: CN201910531231.8 20190619,CN202010066141.9 20200120,CN202010066148.0 20200120
- Main IPC: H01L31/18
- IPC: H01L31/18 ; C23C14/18 ; C23C14/24 ; C23C14/04 ; H01L31/09 ; C30B29/12 ; C30B29/64 ; H01L31/0224 ; H01L31/032 ; C30B25/10

Abstract:
A method for preparing an ultrathin two-dimensional (2D) monocrystalline nanosheet, the method including: 1) placing BiX3 powder where X=I, Br, or Cl in a crucible, and putting the crucible on a first heating zone of a furnace disposed at a gas inlet of a quartz tube; placing substrates covered with metal sheets on a second heating zone of the furnace disposed at a gas outlet of the quartz tube; 2) vacuumizing the quartz tube; pumping Ar gas into the quartz tube until the air pressure is 101.325 kPa; pumping a carrier gas into the quartz tube; and 3) heating and maintaining the second heating zone; heating the first heating zone for BiX3 evaporation until producing chemical reaction between BiX3 and the metal sheets, and preparing ultrathin 2D nanosheets on the substrates simultaneously; and cooling the substrate naturally to 15-30° C.
Information query
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