公开(公告)号：US11114579B2

公开(公告)日：2021-09-07

申请号：US16905995

申请日：2020-06-19

Applicant: University of Electronic Science and Technology of China

Inventor： Jie Xiong ,  Chuanhui Gong ,  Yang Wang ,  Gaofeng Rao ,  Chujun Yin ,  Chaoyi Yan ,  Junwei Chu ,  Jianwen Huang ,  Miao Zhang ,  Xinrui Chen ,  Yuqing Liu ,  Chunyang Wu ,  Xianfu Wang ,  Liping Dai ,  Wanli Zhang ,  Yanrong Li

IPC: H01L31/18 ,  C23C14/18 ,  C23C14/24 ,  C23C14/04 ,  H01L31/09 ,  C30B29/12 ,  C30B29/64 ,  H01L31/0224 ,  H01L31/032 ,  C30B25/10

Abstract: A method for preparing an ultrathin two-dimensional (2D) monocrystalline nanosheet, the method including: 1) placing BiX3 powder where X=I, Br, or Cl in a crucible, and putting the crucible on a first heating zone of a furnace disposed at a gas inlet of a quartz tube; placing substrates covered with metal sheets on a second heating zone of the furnace disposed at a gas outlet of the quartz tube; 2) vacuumizing the quartz tube; pumping Ar gas into the quartz tube until the air pressure is 101.325 kPa; pumping a carrier gas into the quartz tube; and 3) heating and maintaining the second heating zone; heating the first heating zone for BiX3 evaporation until producing chemical reaction between BiX3 and the metal sheets, and preparing ultrathin 2D nanosheets on the substrates simultaneously; and cooling the substrate naturally to 15-30° C.