Invention Grant
- Patent Title: MEMS-sensor
-
Application No.: US16270219Application Date: 2019-02-07
-
Publication No.: US11117798B2Publication Date: 2021-09-14
- Inventor: Gunar Lorenz , Alfons Dehe , Marc Fueldner , Bernd Goller , Ulrich Krumbein , Andreas Wiesbauer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102018203098.7 20180301
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B7/00 ; B81B3/00 ; B81B7/02 ; H04R19/04 ; H04R1/02 ; G01L9/00 ; H04R19/00

Abstract:
A MEMS sensor includes a housing with an interior volume, wherein the housing has an access port to the interior volume, a MEMS component in the housing, and a protection structure, which reduces an introduction of electromagnetic disturbance radiation with a wavelength in the range between 10 nm and 20 μm into the interior volume through the access port and reduces a propagation of the electromagnetic disturbance radiation in the interior volume.
Public/Granted literature
- US20190270639A1 MEMS-Sensor Public/Granted day:2019-09-05
Information query
IPC分类: