Invention Grant
- Patent Title: Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s)
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Application No.: US16491963Application Date: 2019-08-05
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Publication No.: US11119417B2Publication Date: 2021-09-14
- Inventor: Amnon Manassen , Yuri Paskover , Eran Amit
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- International Application: PCT/US2019/045039 WO 20190805
- International Announcement: WO2020/106335 WO 20200528
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G03F7/20 ; G01B9/02 ; G01B11/27
Abstract:
Scatterometry overlay (SCOL) measurement methods, systems and targets are provided to enable efficient SCOL metrology with in-die targets. Methods comprise generating a signal matrix by: illuminating a SCOL target at multiple values of at least one illumination parameter, and at multiple spot locations on the target, wherein the illumination is at a NA (numerical aperture) >⅓ yielding a spot diameter
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