Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
-
Application No.: US16563924Application Date: 2019-09-08
-
Publication No.: US11121312B2Publication Date: 2021-09-14
- Inventor: Da-Jun Lin , Tai-Cheng Hou , Bin-Siang Tsai , Ting-An Chien
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: TW108128913 20190814
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/02 ; H01L27/22

Abstract:
A method for fabricating semiconductor device includes the steps of: forming an inter-metal dielectric (IMD) layer on a substrate; forming a metal interconnection in the IMD layer; forming a magnetic tunneling junction (MTJ) on the metal interconnection; forming a top electrode on the MTJ; and forming a trapping layer on the top electrode for trapping hydrogen. Preferably, the trapping layer includes a concentration gradient, in which a concentration of hydrogen decreases from a top surface of the top electrode toward the MTJ.
Public/Granted literature
- US20210050511A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-02-18
Information query
IPC分类: