Invention Grant

Test system
Abstract:
A test system configured to perform an electrical-characteristic test on a device under test, includes: a mount on which the device under test is to be mounted; a conveyance mechanism configured to convey the mount; a test head including a measurement circuit for performing the electrical-characteristic test; a probe configured to connect an electrode of the device under test to the measurement circuit; a lifting and lowering mechanism configured to move the mount along a first direction such that the electrode and the probe are in contact or spaced apart; and an alignment mechanism provided at the test head, the alignment mechanism being configured to move the probe on a plane crossing the first direction so as to align the probe with the electrode on the plane.
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