公开(公告)号：US11125814B2

公开(公告)日：2021-09-21

申请号：US16482830

申请日：2017-12-19

Applicant: SINTOKOGIO, LTD.

Inventor： Takayuki Hamada ,  Yoichi Sakamoto

IPC: G01R31/00 ,  G01R31/28 ,  G01R1/04 ,  G01R1/073

Abstract: A test system configured to perform an electrical-characteristic test on a device under test, includes: a mount on which the device under test is to be mounted; a conveyance mechanism configured to convey the mount; a test head including a measurement circuit for performing the electrical-characteristic test; a probe configured to connect an electrode of the device under test to the measurement circuit; a lifting and lowering mechanism configured to move the mount along a first direction such that the electrode and the probe are in contact or spaced apart; and an alignment mechanism provided at the test head, the alignment mechanism being configured to move the probe on a plane crossing the first direction so as to align the probe with the electrode on the plane.

公开(公告)号：US10816590B2

公开(公告)日：2020-10-27

申请号：US15571265

申请日：2016-08-29

Applicant: SINTOKOGIO, LTD.

Inventor： Nobuyuki Takita ,  Yoichi Sakamoto

IPC: G01R31/26

Abstract: A test system is a test system for conducting a test including a static characteristic test of a device under test, the test system comprising: a plurality of static characteristic units used for measurement of the static characteristic test; and a replacement unit configured to be able to attach and detach specific units among the plurality of static characteristic units, the specific units selectively used according to a measurement item.

公开(公告)号：US10578663B2

公开(公告)日：2020-03-03

申请号：US15568849

申请日：2016-03-14

Applicant: SINTOKOGIO, LTD.

Inventor： Yoichi Sakamoto ,  Takayuki Hamada ,  Nobuyuki Takita

IPC: G01R31/26 ,  G01R31/28

Abstract: An inspection device comprises a stage for placing a device under test thereon, a dynamic characteristics test probe, a static characteristics test probe, and a control device configured to perform positional control by moving at least one of the stage, the dynamic characteristics test probe, and the static characteristics test probe. The control device performs the positional control such that the dynamic characteristics test probe is set to a dynamic characteristics test state in which the dynamic characteristics test probe is brought into contact with the electrode when the dynamic characteristics test is performed, and performs the positional control such that the static characteristics test probe is set to a static characteristics test state in which the static characteristics test probe is brought into contact with the electrode while the dynamic characteristics test probe is separated from the electrode when the static characteristics test is performed.

公开(公告)号：US10161990B2

公开(公告)日：2018-12-25

申请号：US15124439

申请日：2015-02-05

Applicant: SINTOKOGIO, LTD.

Inventor： Nobuyuki Takita ,  Takayuki Hamada ,  Yoichi Sakamoto ,  Syuji Ishikawa

IPC: G01R31/27 ,  G01R31/26 ,  G01R1/04 ,  G01R31/28

Abstract: In an inspection system for a device to be tested, a stage, on which a device to be tested and a diode are loaded, is moved to a static characteristic test station and a dynamic characteristic test station. A method for operating an inspection system for a device to be tested includes a process of carrying in and loading the stage, on which the device to be tested and the diode are loaded, a process of carrying in and fixing the device to be tested to a test station, a process of bringing a probe into contact with the diode, a process of switching a position of the diode, a process of performing a measurement with respect to the device to be tested, a process of carrying out the device to be tested from the stage, and a process of classifying the device to be tested.