- 专利标题: Back end of the line metal structure and method
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申请号: US16654059申请日: 2019-10-16
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公开(公告)号: US11127674B2公开(公告)日: 2021-09-21
- 发明人: Dirk Breuer , Oliver M. Witnik , Carla Byloos , Holger S. Schuehrer
- 申请人: GLOBALFOUNDRIES U.S. INC.
- 申请人地址: US NY Malta
- 专利权人: GLOBALFOUNDRIES U.S. INC.
- 当前专利权人: GLOBALFOUNDRIES U.S. INC.
- 当前专利权人地址: US NY Malta
- 代理机构: Gibb & Riley, LLC
- 代理商 Anthony J. Canale
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L23/532 ; H01L21/768 ; H01L23/528
摘要:
Disclosed are embodiments of a back end of the line (BEOL) metal structure that includes, within a metal level, a metal via, which has at least eight sides and all interior angles at 135° or more, and a metal wire thereon. The metal wire and via include respective portions of a continuous conformal metal layer. A passivation layer coats the top surface of the metal layer. The metal via and the metal wire thereon can be in an upper metal level and can be made of one metal (e.g., aluminum or an aluminum alloy). The upper metal level can be above a lower metal level that similarly includes a metal via and metal wire thereon, but the metal used can be different (e.g., copper) and/or the shape of the via can be different (e.g., four-sided). Also disclosed herein are method embodiments for forming the above-described BEOL metal structure.
公开/授权文献
- US20210118796A1 BACK END OF THE LINE METAL STRUCTURE AND METHOD 公开/授权日:2021-04-22
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