Invention Grant
- Patent Title: Dual temperature heater
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Application No.: US16443185Application Date: 2019-06-17
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Publication No.: US11133210B2Publication Date: 2021-09-28
- Inventor: Dale R. Du Bois , Juan Carlos Rocha-Alvarez , Sanjeev Baluja , Ganesh Balasubramanian , Lipyeow Yap , Jianhua Zhou , Thomas Nowak
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/324
- IPC: H01L21/324 ; C23C16/458 ; H01L21/68 ; H01L21/687 ; H01L21/67 ; B05C13/00 ; H01J37/32
Abstract:
A method and apparatus for positioning and heating a substrate in a chamber are provided. In one embodiment, the apparatus comprises a substrate support assembly having a support surface adapted to receive the substrate and a plurality of centering fingers for supporting the substrate at a distance parallel to the support surface and for centering the substrate relative to a reference axis substantially perpendicular to the support surface. The plurality of the centering fingers are movably disposed along a periphery of the support surface, and each of the plurality of centering fingers comprises a first end portion for either contacting or supporting a peripheral edge of the substrate.
Public/Granted literature
- US20190304825A1 DUAL TEMPERATURE HEATER Public/Granted day:2019-10-03
Information query
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