Invention Grant
- Patent Title: Correction of fabricated shapes in additive manufacturing
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Application No.: US16737818Application Date: 2020-01-08
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Publication No.: US11154961B2Publication Date: 2021-10-26
- Inventor: Mayu Felicia Yamamura , Jason Garcheung Fung , Daniel Redfield , Rajeev Bajaj , Hou T. Ng
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/26
- IPC: B24B37/26 ; B24D18/00 ; B29C64/393 ; B29C64/112 ; B29C64/165 ; B33Y10/00 ; B33Y30/00 ; B33Y50/02 ; B33Y80/00 ; B24B37/20 ; B29L31/00
Abstract:
A method of fabricating a polishing pad using an additive manufacturing system includes receiving data indicative of a desired shape of the polishing pad to be fabricated by droplet ejection. The desired shape defines a profile including a polishing surface and one or more grooves on the polishing pad. Data indicative of a modified pattern of dispensing feed material is generated to at least partially compensate for distortions of the profile caused by the additive manufacturing system, and a plurality of layers of the feed material are dispensed by droplet ejection in accordance to the modified pattern.
Information query
