Invention Grant
- Patent Title: Methods of forming a conductive contact structure to an embedded memory device on an IC product and a corresponding IC product
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Application No.: US16726497Application Date: 2019-12-24
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Publication No.: US11158574B2Publication Date: 2021-10-26
- Inventor: Nicholas LiCausi , Julien Frougier , Keith Donegan , Hyung Woo Kim
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L45/00 ; H01L23/532 ; H01L27/24 ; H01L27/22 ; H01L27/11587 ; H01L27/1159 ; H01L43/02 ; H01L43/08 ; H01L43/12 ; H01L23/522

Abstract:
One illustrative device disclosed herein includes a layer of insulating material with its upper surface positioned at a first level and a recessed conductive interconnect structure positioned at least partially within the layer of insulating material, wherein a recessed upper surface of the recessed conductive interconnect structure is positioned at a second level that is below the first level. In this example, the device also includes a conductive cap layer positioned on the recessed upper surface of the recessed conductive interconnect structure, wherein an upper surface of the conductive cap layer is substantially co-planar with the upper surface of the layer of insulating material and a memory cell positioned above the conductive cap layer, wherein the memory cell comprises a lower conductive material that is conductively coupled to the conductive cap layer.
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