- 专利标题: Semiconductor packages having improved reliability in bonds between connection conductors and pads
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申请号: US17007223申请日: 2020-08-31
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公开(公告)号: US11158594B2公开(公告)日: 2021-10-26
- 发明人: Jiseok Hong , Hyuekjae Lee , Jongpa Hong , Jihwan Hwang , Taehun Kim
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Myers Bigel, P.A.
- 优先权: KR10-2019-0144198 20191112
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L25/065 ; H01L23/48
摘要:
A semiconductor package includes a first semiconductor chip having a through-electrode and an upper connection pad on an upper surface of the first semiconductor chip that is connected to the through-electrode; a second semiconductor chip stacked on the first semiconductor chip, and having a lower connection pad on a lower surface of the second semiconductor chip; a non-conductive film between the first semiconductor chip and the second semiconductor chip, with the non-conductive film including voids having an average diameter of 1 μm to 100 μm, the voids having a volume fraction of 0.1 to 5 vol %; and a connection conductor that penetrates the non-conductive film and connects the upper connection pad and the lower connection pad.
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