Invention Grant
- Patent Title: Coil-integrated-type yoke and manufacturing method of the same
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Application No.: US16461109Application Date: 2018-04-04
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Publication No.: US11164697B2Publication Date: 2021-11-02
- Inventor: Keisuke Matsushima , Tsutomu Karimata
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2017-076547 20170407
- International Application: PCT/JP2018/014354 WO 20180404
- International Announcement: WO2018/186427 WO 20181011
- Main IPC: H01F7/06
- IPC: H01F7/06 ; H01F41/04 ; H01F7/20 ; H01F27/28 ; H01J37/147 ; H01F41/06 ; H01J37/28

Abstract:
A coil-integrated-type yoke for realizing a deflector that can accurately deflect an orbit of an electron beam and a manufacturing method thereof are provided. There is provided a manufacturing method of a coil-integrated-type yoke, the manufacturing method including: a step of sequentially inserting a molding agent, a coil, and a spacer into a groove heading from a first surface toward a second surface of the yoke; and a step of polishing the first surface of the yoke and the spacer together.
Public/Granted literature
- US20200066477A1 COIL-INTEGRATED-TYPE YOKE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2020-02-27
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