公开(公告)号：US11090619B2

公开(公告)日：2021-08-17

申请号：US17061899

申请日：2020-10-02

Applicant: EBARA CORPORATION

Inventor： Keisuke Matsushima ,  Kazutomo Miyazaki

IPC: B01F3/02 ,  G03F7/20 ,  G05D11/02

Abstract: An exhaust system capable of diluting a hydrogen gas to a concentration below the lower explosive limit without requiring a large amount of dilution gas while preventing an increase in a pressure of an exhaust gas in a buffer tank is disclosed. The exhaust system performs, when a main valve disposed in an exhaust line is closed, an initial exhaust operation in which a gas heavier than the hydrogen gas is discharged from a lower part of a buffer tank while an inlet valve disposed in an inlet line and a first outlet valve disposed in an outlet line are opened to introduce the exhaust gas from an equipment in a tangential direction of a buffer tank. Next, the exhaust system performs a hydrogen-gas discharge operation in which the inlet valve and the first outlet valve are closed, and the a bypass valve disposed in a bypass line and the second outlet valve disposed in a hydrogen-gas discharge line are opened to discharge the hydrogen gas stayed in an upper part of the buffer tank while flowing the exhaust gas into a bypass line.

公开(公告)号：US11164697B2

公开(公告)日：2021-11-02

申请号：US16461109

申请日：2018-04-04

Applicant: EBARA CORPORATION

Inventor： Keisuke Matsushima ,  Tsutomu Karimata

IPC: H01F7/06 ,  H01F41/04 ,  H01F7/20 ,  H01F27/28 ,  H01J37/147 ,  H01F41/06 ,  H01J37/28

Abstract: A coil-integrated-type yoke for realizing a deflector that can accurately deflect an orbit of an electron beam and a manufacturing method thereof are provided. There is provided a manufacturing method of a coil-integrated-type yoke, the manufacturing method including: a step of sequentially inserting a molding agent, a coil, and a spacer into a groove heading from a first surface toward a second surface of the yoke; and a step of polishing the first surface of the yoke and the spacer together.