- 专利标题： Temperature-controlled flange and reactor system including same
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申请号： US16816078申请日： 2020-03-11
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公开(公告)号： US11168395B2公开(公告)日： 2021-11-09
- 发明人: Sonti Sreeram , John Tolle , Joe Margetis , Junwei Su
- 申请人： ASM IP Holding B.V.
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding B.V.
- 当前专利权人： ASM IP Holding B.V.
- 当前专利权人地址： NL Almere
- 代理机构： Snell & Wilmer L.L.P.
- 主分类号： C23C16/455
- IPC分类号： C23C16/455
摘要：
A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.
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