公开(公告)号：US20200002811A1

公开(公告)日：2020-01-02

申请号：US16024390

申请日：2018-06-29

Applicant: ASM IP Holding B.V.

Inventor： Sonti Sreeram ,  John Tolle ,  Joe Margetis ,  Junwei Su

IPC: C23C16/455

Abstract: A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.

公开(公告)号：US20200224309A1

公开(公告)日：2020-07-16

申请号：US16816078

申请日：2020-03-11

Applicant: ASM IP Holding B.V.

Inventor： Sonti Sreeram ,  John Tolle ,  Joe Margetis ,  Junwei Su

IPC: C23C16/455

Abstract: A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.

公开(公告)号：US11718913B2

公开(公告)日：2023-08-08

申请号：US15997445

申请日：2018-06-04

Applicant: ASM IP Holding B.V.

Inventor： Sonti Sreeram ,  Junwei Su ,  Loc Vinh Tran

IPC: C23C16/455 ,  H01J37/32

CPC classification number: C23C16/45587 ,  C23C16/45557 ,  C23C16/45561 ,  C23C16/45563 ,  H01J37/32449 ,  H01J37/32458

Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas distribution system coupled to a reaction chamber.

公开(公告)号：US11168395B2

公开(公告)日：2021-11-09

申请号：US16816078

申请日：2020-03-11

Applicant: ASM IP Holding B.V.

Inventor： Sonti Sreeram ,  John Tolle ,  Joe Margetis ,  Junwei Su

IPC: C23C16/455

Abstract: A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.

公开(公告)号：US12024775B2

公开(公告)日：2024-07-02

申请号：US18207322

申请日：2023-06-08

Applicant: ASM IP Holding B.V.

Inventor： Sonti Sreeram ,  Junwei Su ,  Loc Vinh Tran

IPC: C23C16/455 ,  H01J37/32

CPC classification number: C23C16/45587 ,  C23C16/45557 ,  C23C16/45561 ,  C23C16/45563 ,  H01J37/32449 ,  H01J37/32458

Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas distribution system coupled to a reaction chamber.

公开(公告)号：US20230313377A1

公开(公告)日：2023-10-05

申请号：US18207322

申请日：2023-06-08

Applicant: ASM IP Holding B.V.

Inventor： Sonti Sreeram ,  Junwei Su ,  Loc Vinh Tran

IPC: C23C16/455

CPC classification number: C23C16/45587 ,  C23C16/45557 ,  C23C16/45561 ,  C23C16/45563 ,  H01J37/32458

Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas distribution system coupled to a reaction chamber.