Invention Grant
- Patent Title: Temperature-controlled flange and reactor system including same
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Application No.: US16816078Application Date: 2020-03-11
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Publication No.: US11168395B2Publication Date: 2021-11-09
- Inventor: Sonti Sreeram , John Tolle , Joe Margetis , Junwei Su
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: C23C16/455
- IPC: C23C16/455
Abstract:
A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.
Public/Granted literature
- US20200224309A1 TEMPERATURE-CONTROLLED FLANGE AND REACTOR SYSTEM INCLUDING SAME Public/Granted day:2020-07-16
Information query
IPC分类:
