- 专利标题： Method and apparatus for inspection and metrology
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申请号： US15558186申请日： 2016-03-25
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公开(公告)号： US11170072B2公开(公告)日： 2021-11-09
- 发明人: Everhardus Cornelis Mos , Velislava Ignatova , Erik Jensen , Michael Kubis , Hubertus Johannes Gertrudus Simons , Peter Ten Berge , Erik Johannes Maria Wallerbos , Jochem Sebastiaan Wildenberg
- 申请人： ASML Netherlands B.V.
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pilisbury Winthrop Shaw Pittman LLP
- 国际申请： PCT/EP2016/056710 WO 20160325
- 国际公布： WO2016/162231 WO 20161013
- 主分类号： G06F17/18
- IPC分类号： G06F17/18 ; G06F30/20 ; H01L21/66 ; G03F7/20 ; G03F9/00
摘要：
A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.
公开/授权文献
- US20180067900A1 METHOD AND APPARATUS FOR INSPECTION AND METROLOGY 公开/授权日：2018-03-08
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