公开(公告)号：US11170072B2

公开(公告)日：2021-11-09

申请号：US15558186

申请日：2016-03-25

Applicant: ASML Netherlands B.V.

Inventor： Everhardus Cornelis Mos ,  Velislava Ignatova ,  Erik Jensen ,  Michael Kubis ,  Hubertus Johannes Gertrudus Simons ,  Peter Ten Berge ,  Erik Johannes Maria Wallerbos ,  Jochem Sebastiaan Wildenberg

IPC: G06F17/18 ,  G06F30/20 ,  H01L21/66 ,  G03F7/20 ,  G03F9/00

Abstract: A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.