Invention Grant
- Patent Title: Using piezoelectric electrodes as active surfaces for electroplating process
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Application No.: US16270481Application Date: 2019-02-07
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Publication No.: US11173258B2Publication Date: 2021-11-16
- Inventor: Gabriele Vigevani , Xin Zhang
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: A61M11/00
- IPC: A61M11/00 ; H01L41/047 ; H01L41/053 ; H01L41/09 ; H01L41/187 ; H01L41/23 ; C25D5/54 ; H01L41/316 ; H01L41/332 ; A61M15/00 ; C25D7/12 ; H01L41/29 ; B05B17/06 ; B05B17/00
Abstract:
Microelectromechanical systems (MEMS) mesh-membrane nebulizers are described. The MEMS mesh-membrane nebulizers may include a piezoelectric MEMS mesh membrane. The piezoelectric MEMS mesh membrane may include a piezoelectric active layer patterned with openings for making droplets. One electrode of the piezoelectric MEMS mesh membrane may serve as an electrode for electroplating. Activation of the piezoelectric MEMS mesh membrane may generate droplets suitable for delivery of medicines or other uses.
Public/Granted literature
- US20200069890A1 USING PIEZOELECTRIC ELECTRODES AS ACTIVE SURFACES FOR ELECTROPLATING PROCESS Public/Granted day:2020-03-05
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