公开(公告)号：US11173258B2

公开(公告)日：2021-11-16

申请号：US16270481

申请日：2019-02-07

Applicant: Analog Devices, Inc.

Inventor： Gabriele Vigevani ,  Xin Zhang

IPC: A61M11/00 ,  H01L41/047 ,  H01L41/053 ,  H01L41/09 ,  H01L41/187 ,  H01L41/23 ,  C25D5/54 ,  H01L41/316 ,  H01L41/332 ,  A61M15/00 ,  C25D7/12 ,  H01L41/29 ,  B05B17/06 ,  B05B17/00

Abstract: Microelectromechanical systems (MEMS) mesh-membrane nebulizers are described. The MEMS mesh-membrane nebulizers may include a piezoelectric MEMS mesh membrane. The piezoelectric MEMS mesh membrane may include a piezoelectric active layer patterned with openings for making droplets. One electrode of the piezoelectric MEMS mesh membrane may serve as an electrode for electroplating. Activation of the piezoelectric MEMS mesh membrane may generate droplets suitable for delivery of medicines or other uses.

公开(公告)号：US20200069890A1

公开(公告)日：2020-03-05

申请号：US16270481

申请日：2019-02-07

Applicant: Analog Devices, Inc.

Inventor： Gabriele Vigevani ,  Xin Zhang

IPC: A61M11/00 ,  H01L41/047 ,  H01L41/053 ,  H01L41/09 ,  H01L41/187 ,  H01L41/23 ,  H01L41/29 ,  H01L41/316 ,  H01L41/332 ,  A61M15/00 ,  C25D7/12 ,  C25D5/54

Abstract: Microelectromechanical systems (MEMS) mesh-membrane nebulizers are described. The MEMS mesh-membrane nebulizers may include a piezoelectric MEMS mesh membrane. The piezoelectric MEMS mesh membrane may include a piezoelectric active layer patterned with openings for making droplets. One electrode of the piezoelectric MEMS mesh membrane may serve as an electrode for electroplating. Activation of the piezoelectric MEMS mesh membrane may generate droplets suitable for delivery of medicines or other uses.