Invention Grant
- Patent Title: MEMS gyroscope control circuit
-
Application No.: US16452850Application Date: 2019-06-26
-
Publication No.: US11175138B2Publication Date: 2021-11-16
- Inventor: Deyou Fang , Chao-Ming Tsai , Milad Alwardi , Yamu Hu , David McClure
- Applicant: STMicroelectronics, Inc.
- Applicant Address: US TX Coppell
- Assignee: STMicroelectronics, Inc.
- Current Assignee: STMicroelectronics, Inc.
- Current Assignee Address: US TX Coppell
- Agency: Crowe & Dunlevy
- Main IPC: G01C19/5726
- IPC: G01C19/5726 ; G01C25/00 ; G01C19/5733

Abstract:
A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.
Information query