公开(公告)号：US11175138B2

公开(公告)日：2021-11-16

申请号：US16452850

申请日：2019-06-26

Applicant: STMicroelectronics, Inc.

Inventor： Deyou Fang ,  Chao-Ming Tsai ,  Milad Alwardi ,  Yamu Hu ,  David McClure

IPC: G01C19/5726 ,  G01C25/00 ,  G01C19/5733

Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

公开(公告)号：US11719540B2

公开(公告)日：2023-08-08

申请号：US17571973

申请日：2022-01-10

Applicant: STMicroelectronics, Inc.

Inventor： Yamu Hu ,  Deyou Fang ,  David McClure ,  Huantong Zhang ,  Naren K. Sahoo

IPC: G01C19/5719 ,  H04L27/38

CPC classification number: G01C19/5719 ,  H04L27/3863

Abstract: A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.

公开(公告)号：US11320452B2

公开(公告)日：2022-05-03

申请号：US16452904

申请日：2019-06-26

Applicant: STMicroelectronics, Inc. ,  STMicroelectronics S.r.l.

Inventor： Yamu Hu ,  David McClure ,  Alessandro Tocchio ,  Naren K. Sahoo ,  Anthony Junior Casillan

IPC: G01P21/00 ,  G01P15/08

Abstract: A microelectromechanical system (MEMS) accelerometer sensor has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal is applied to the sensing capacitor during a reset phase of a sensing circuit coupled to the sensing capacitor. The test signal is configured to cause an electrostatic force which produces a physical displacement of the mobile mass corresponding to a desired acceleration value. Then, during a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the physical displacement of the mobile mass is sensed. This sensed variation in capacitance is converted to a sensed acceleration value. A comparison of the sensed acceleration value to the desired acceleration value provides an indication of an error in operation of the MEMS accelerometer sensor if the sensed acceleration value and desired acceleration value are not substantially equal.

公开(公告)号：US12111158B2

公开(公告)日：2024-10-08

申请号：US18136088

申请日：2023-04-18

Applicant: STMicroelectronics, Inc.

Inventor： Deyou Fang ,  Chao-Ming Tsai ,  Milad Alwardi ,  Yamu Hu ,  David McClure

IPC: G01C19/5726 ,  G01C19/5733 ,  G01C25/00

CPC classification number: G01C19/5726 ,  G01C19/5733 ,  G01C25/005

Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

公开(公告)号：US11662205B2

公开(公告)日：2023-05-30

申请号：US17504994

申请日：2021-10-19

Applicant: STMicroelectronics, Inc.

Inventor： Deyou Fang ,  Chao-Ming Tsai ,  Milad Alwardi ,  Yamu Hu ,  David McClure

IPC: G01C19/5726 ,  G01C25/00 ,  G01C19/5733

CPC classification number: G01C19/5726 ,  G01C19/5733 ,  G01C25/005

Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.