- 专利标题: Dual-level pulse tuning
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申请号: US16429883申请日: 2019-06-03
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公开(公告)号: US11177115B2公开(公告)日: 2021-11-16
- 发明人: Gary Leray , Valentin N. Todorow , James Rogers
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson + Sheridan, LLP
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H01L21/67 ; H01L21/3065 ; H01L21/3213
摘要:
Embodiments for the present application include methods and apparatus for operating a plasma enhanced substrate processing system using dual level pulsed radio frequency (RF) power. More specifically, embodiments of the present disclosure allow for frequency and power tuning in a process chamber using dual level pulsed power by using a tuning controller coupled to a matching network and/or a RF power generator. In one embodiment, a tuning system includes a tuning controller disposed in a tuning system, the tuning controller configured to tune dual level RF pulsing data from a RF power generator, wherein the tuning system is connectable to a plasma processing chamber, and a memory connecting to the tuning controller, wherein the tuning controller is configured to couple to a RF power generator and a matching network disposed in the plasma processing chamber.
公开/授权文献
- US20200381214A1 DUAL-LEVEL PULSE TUNING 公开/授权日:2020-12-03
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