Invention Grant
- Patent Title: Small-angle x-ray scatterometry
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Application No.: US17254281Application Date: 2019-07-04
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Publication No.: US11181490B2Publication Date: 2021-11-23
- Inventor: Alex Dikopoltsev , Matthew Wormington , Yuri Vinshtein , Alexander Krokhmal
- Applicant: BRUKER TECHNOLOGIES LTD.
- Applicant Address: IL Migdal HaEmek
- Assignee: BRUKER TECHNOLOGIES LTD.
- Current Assignee: BRUKER TECHNOLOGIES LTD.
- Current Assignee Address: IL Migdal HaEmek
- Agency: Kligler & Associates Patent Attorneys Ltd
- International Application: PCT/IB2019/055735 WO 20190704
- International Announcement: WO2020/008420 WO 20200109
- Main IPC: G01N23/201
- IPC: G01N23/201 ; G01N23/207 ; G01T1/166 ; G01N23/223

Abstract:
An x-ray apparatus, that may include a mount that is configured to hold a sample; an x-ray source, that is configured to direct an x-ray beam toward a first side of the sample; a detector, positioned downstream to a second side of the sample, the detector is configured to detect, during a sample measurement period, at least a part of x-rays that have been transmitted through the sample; and an x-ray intensity detector that is positioned, during a beam intensity monitoring period at a measurement position that is located between the x-ray source and the first side of the sample, so as to detect at least a part of the x-ray beam before the x-ray beam reaches the sample.
Public/Granted literature
- US20210285898A1 Small-angle x-ray scatterometry Public/Granted day:2021-09-16
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