公开(公告)号：US20240377342A1

公开(公告)日：2024-11-14

申请号：US18783482

申请日：2024-07-25

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

Abstract: An x-ray apparatus includes a mount that is configured to hold a sample and an x-ray source that is configured to direct an x-ray beam toward a first side of the sample. A small angle x-ray scattering (SAXS) detector is positioned downstream to a second side of the sample, and configured to detect at least a part of a SAXS pattern formed by x-rays that have been transmitted through the sample and exited through the second side. An x-ray fluorescence (XRF) detector is configured to detect fluorescent x-rays emitted from the sample, wherein the XRF detector comprises an aperture.

公开(公告)号：US11703464B2

公开(公告)日：2023-07-18

申请号：US17505696

申请日：2021-10-20

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01T1/166 ,  G01N23/223

CPC classification number: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166 ,  G01N2223/6116

Abstract: A method for evaluating an array of high aspect ratio (HAR) structures on a sample includes illuminating the sample with an x-ray beam along a first axis parallel to within two degrees to the HAR structures in the array and sensing a first pattern of small angle x-ray scattering (SAXS) scattered from the sample while illuminating the sample along the first axis. The sample is illuminated with the x-ray beam along a second axis that is oblique to the HAR structures in the array, and a second pattern of the SAXS scattered from the sample is sensed while illuminating the sample along the second axis. Information is extracted with respect to the HAR structures based on the first and second patterns.

公开(公告)号：US11181490B2

公开(公告)日：2021-11-23

申请号：US17254281

申请日：2019-07-04

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01T1/166 ,  G01N23/223

Abstract: An x-ray apparatus, that may include a mount that is configured to hold a sample; an x-ray source, that is configured to direct an x-ray beam toward a first side of the sample; a detector, positioned downstream to a second side of the sample, the detector is configured to detect, during a sample measurement period, at least a part of x-rays that have been transmitted through the sample; and an x-ray intensity detector that is positioned, during a beam intensity monitoring period at a measurement position that is located between the x-ray source and the first side of the sample, so as to detect at least a part of the x-ray beam before the x-ray beam reaches the sample.

公开(公告)号：US12085521B2

公开(公告)日：2024-09-10

申请号：US18307823

申请日：2023-04-27

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

CPC classification number: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166 ,  G01N2223/6116

Abstract: A method for evaluating a sample that includes an array of structural elements. The method includes obtaining a first small angle x-ray scattering (SAXS) pattern for a first angular relationship between the sample and an x-ray beam that exhibits a first collimation value and has a given cross-sectional area on a first side of the sample. A second SAXS pattern is obtained for a second angular relationship between the sample and the x-ray beam, while the x-ray beam exhibits a second collimation value that differs from the first collimation value while maintaining the given cross-sectional area of the x-ray beam on the first side of the sample, wherein the second angular relationship differs from the first angular relationship.

公开(公告)号：US20240077435A1

公开(公告)日：2024-03-07

申请号：US18307823

申请日：2023-04-27

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

CPC classification number: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166 ,  G01N2223/6116

Abstract: A method for evaluating a sample that includes an array of structural elements. The method includes obtaining a first small angle x-ray scattering (SAXS) pattern for a first angular relationship between the sample and an x-ray beam that exhibits a first collimation value and has a given cross-sectional area on a first side of the sample. A second SAXS pattern is obtained for a second angular relationship between the sample and the x-ray beam, while the x-ray beam exhibits a second collimation value that differs from the first collimation value while maintaining the given cross-sectional area of the x-ray beam on the first side of the sample, wherein the second angular relationship differs from the first angular relationship.

公开(公告)号：US20210285898A1

公开(公告)日：2021-09-16

申请号：US17254281

申请日：2019-07-04

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

Abstract: An x-ray apparatus, that may include a mount that is configured to hold a sample; an x-ray source, that is configured to direct an x-ray beam toward a first side of the sample; a detector, positioned downstream to a second side of the sample, the detector is configured to detect, during a sample measurement period, at least a part of x-rays that have been transmitted through the sample; and an x-ray intensity detector that is positioned, during a beam intensity monitoring period at a measurement position that is located between the x-ray source and the first side of the sample, so as to detect at least a part of the x-ray beam before the x-ray beam reaches the sample.