Invention Grant
- Patent Title: Method of building a 3D functional optical material layer stacking structure
-
Application No.: US16293354Application Date: 2019-03-05
-
Publication No.: US11187836B2Publication Date: 2021-11-30
- Inventor: Michael Yu-tak Young , Ludovic Godet , Robert Jan Visser , Naamah Argaman , Christopher Dennis Bencher , Wayne McMillan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B5/18 ; G02B30/26 ; G03F7/00

Abstract:
Embodiments herein describe a sub-micron 3D diffractive optics element and a method for forming the sub-micron 3D diffractive optics element. In a first embodiment, a method is provided for forming a sub-micron 3D diffractive optics element on a substrate without planarization. The method includes depositing a material stack to be patterned on a substrate, depositing and patterning a thick mask material on a portion of the material stack, etching the material stack down one level, trimming a side portion of the thick mask material, etching the material stack down one more level, repeating trim and etch steps above ‘n’ times, and stripping the thick mask material from the material stack.
Public/Granted literature
- US20190278005A1 METHOD OF BUILDING A 3D FUNCTIONAL OPTICAL MATERIAL LAYER STACKING STRUCTURE Public/Granted day:2019-09-12
Information query