Invention Grant
- Patent Title: Stocker
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Application No.: US16439161Application Date: 2019-06-12
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Publication No.: US11189512B2Publication Date: 2021-11-30
- Inventor: Bo Seung Hwang , Seung Keun Jun
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2018-0068122 20180614
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/68 ; B25J9/16 ; B65G47/90

Abstract:
A stocker may include a load port which a cassette for receiving wafers is either loaded on or unloaded from, an aligner configured to align the wafers and to confirm identification codes of the wafers, a plurality of shelves each having slots for receiving the wafers, a first transfer robot having a first robot arm for transferring the wafers between the load port and the aligner and a second transfer robot having a second robot arm for transferring the wafers between the aligner and the shelves.
Public/Granted literature
- US20190382213A1 STOCKER Public/Granted day:2019-12-19
Information query
IPC分类: