APPARATUS AND METHOD FOR TRANSPORTING ARTICLES

    公开(公告)号:US20230211963A1

    公开(公告)日:2023-07-06

    申请号:US18073723

    申请日:2022-12-02

    Abstract: Provided is an apparatus for transporting articles that can effectively treat numerous articles. The apparatus for transporting articles comprises: a frame; a first transport mounting portion connected to the frame and configured to support a first-class article from below; a second transport mounting portion connected to the frame, disposed over the first transport mounting portion and configured to support the first-class article from below; a third transport mounting portion connected to the frame, disposed over the second transport mounting portion and configured to support a second-class article different from the first-class article from below. The first transport mounting portion operates independently of the second and third transport mounting portions, and the second transport mounting portion and the third transport mounting portion operate simultaneously.

    INTER-FLOOR TRANSPORT APPARATUS AND LOGISTICS TRANSPORT SYSTEM INCLUDING THE SAME

    公开(公告)号:US20230207363A1

    公开(公告)日:2023-06-29

    申请号:US18080743

    申请日:2022-12-14

    CPC classification number: H01L21/67727

    Abstract: An inter-floor transport apparatus and a logistics transport system including the inter-floor transport apparatus are provided. The logistics transport system includes: a stage module installed in space where semiconductor devices are fabricated, the stage module including a plurality of stages, which are installed on different floors; a frame module installed to have a direction intersecting the plurality of stages as a length direction; and an inter-floor transport apparatus moving along the frame module and transporting conveyed articles to each of the stages, wherein the inter-floor transport apparatus includes a first load unit, which transports the conveyed articles, a second load unit, which is disposed below the first load unit and transports the conveyed articles, a driving unit, which moves the first and second load units, and a control unit, which controls an operation of the driving unit, and transports a plurality of conveyed articles at the same time.

    Stocker
    3.
    发明授权
    Stocker 有权

    公开(公告)号:US11189512B2

    公开(公告)日:2021-11-30

    申请号:US16439161

    申请日:2019-06-12

    Abstract: A stocker may include a load port which a cassette for receiving wafers is either loaded on or unloaded from, an aligner configured to align the wafers and to confirm identification codes of the wafers, a plurality of shelves each having slots for receiving the wafers, a first transfer robot having a first robot arm for transferring the wafers between the load port and the aligner and a second transfer robot having a second robot arm for transferring the wafers between the aligner and the shelves.

    Tower lift
    4.
    发明授权

    公开(公告)号:US11591167B2

    公开(公告)日:2023-02-28

    申请号:US16396120

    申请日:2019-04-26

    Abstract: A tower lift includes a main frame extending in a vertical direction, a carriage module configured to be movable in the vertical direction along the main frame, a weight module disposed behind the carriage module and configured to be movable in the vertical direction along the main frame, a driving module disposed on the main frame and configured to move the carriage module and the weight module in the vertical direction using at least one timing belt, an auto tensioner disposed on a lower portion of the main frame and connected with the carriage module and the weight module by a balance belt, and an upper alignment unit for aligning a horizontal position of the at least one timing belt.

    Fireproof shutter
    5.
    发明授权

    公开(公告)号:US10954714B2

    公开(公告)日:2021-03-23

    申请号:US16106509

    申请日:2018-08-21

    Abstract: Disclosed is a fireproof shutter for opening and closing a passage between an upper story and a lower story. The fireproof shutter includes a base panel having an opening corresponding to the passage, a door for opening and closing the opening, and a guide unit for guiding the door between an open position in which the door is opened and a closed position in which the door is closed and having a predetermined inclination such that the door is closed by its own weight.

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