Invention Grant
- Patent Title: MEMS package with roughend interface
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Application No.: US16927223Application Date: 2020-07-13
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Publication No.: US11192778B2Publication Date: 2021-12-07
- Inventor: Yu-Jui Chen , I-Shi Wang , Ren-Dou Lee , Jen-Hao Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Duane Morris LLP
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C3/00 ; B81B7/02 ; B81C1/00

Abstract:
A method includes: providing a first substrate on which a plurality of first semiconductor devices is formed; providing a second substrate on which a plurality of second semiconductor devices is formed; and coupling the first and second substrates by contacting respective dummy pads of the first and second substrates, wherein at least one of the dummy pads of the first and second substrates comprises plural peaks and valleys.
Public/Granted literature
- US20200339413A1 MEMS PACKAGE WITH ROUGHEND INTERFACE Public/Granted day:2020-10-29
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