Invention Grant
- Patent Title: Backside contact for thermal displacement in a multi-wafer stacked integrated circuit
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Application No.: US16568623Application Date: 2019-09-12
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Publication No.: US11195818B2Publication Date: 2021-12-07
- Inventor: Ping-Tzu Chen , Hsing-Chih Lin , Min-Feng Kao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/367
- IPC: H01L23/367 ; H01L25/065 ; H01L23/48 ; H01L27/088 ; H01L21/768 ; H01L23/00 ; H01L23/522 ; H01L23/528 ; H01L23/532

Abstract:
In some embodiments, the present disclosure relates to a three dimensional (3D) integrated circuit (IC) stack, including a first IC die having a first substrate and a first interconnect structure over a frontside of the first substrate; a second IC die having a second substrate and a second interconnect structure over the frontside of the second substrate; and a third IC die vertically between the first and second IC dies and having a third substrate, a third interconnect structure over the frontside of the third substrate, and a third bonding structure over a backside of the third substrate. A heat dissipation path extends from the third substrate to at least the first or second substrate, and includes a backside contact that extends from the third bonding structure to the backside of the third substrate and that is thermally coupled to at least the first or second interconnect structure.
Public/Granted literature
- US20210082873A1 BACKSIDE CONTACT FOR THERMAL DISPLACEMENT IN A MULTI-WAFER STACKED INTEGRATED CIRCUIT Public/Granted day:2021-03-18
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