- 专利标题： Method and system for thermal control of devices in an electronics tester
-
申请号： US16576555申请日： 2019-09-19
-
公开(公告)号： US11209497B2公开(公告)日： 2021-12-28
- 发明人: Jovan Jovanovic , Kenneth W. Deboe , Steven C. Steps
- 申请人： Aehr Test Systems
- 申请人地址： US CA Fremont
- 专利权人： Aehr Test Systems
- 当前专利权人： Aehr Test Systems
- 当前专利权人地址： US CA Fremont
- 代理商 Stephen M. De Klerk
- 主分类号： G01R31/00
- IPC分类号： G01R31/00 ; G01R31/28 ; H01L21/67 ; G01R31/50 ; H01L21/66 ; H01L21/324 ; H01L21/687 ; G01R1/04
摘要：
A tester apparatus is provided. Slot assemblies are removably mounted to a frame. Each slot assembly allows for individual heating and temperature control of a respective cartridge that is inserted into the slot assembly. A closed loop air path is defined by the frame and a heater and cooler are located in the closed loop air path to cool or heat the cartridge with air. Individual cartridges can be inserted or be removed while other cartridges are in various stages of being tested or in various stages of temperature ramps.
公开/授权文献
信息查询
