- 专利标题: Semiconductor device and method for manufacturing semiconductor device
-
申请号: US16755208申请日: 2018-10-29
-
公开(公告)号: US11211467B2公开(公告)日: 2021-12-28
- 发明人: Shunpei Yamazaki , Tomoki Hiramatsu , Yusuke Nonaka , Noritaka Ishihara , Shota Sambonsuge , Yasumasa Yamane , Yuta Endo
- 申请人: Semiconductor Energy Laboratory Co., Ltd.
- 申请人地址: JP Atsugi
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi
- 代理机构: Robinson Intellectual Property Law Office
- 代理商 Eric J. Robinson
- 优先权: JPJP2017-216669 20171109
- 国际申请: PCT/IB2018/058425 WO 20181029
- 国际公布: WO2019/092541 WO 20190516
- 主分类号: H01L29/51
- IPC分类号: H01L29/51 ; H01L21/8238
摘要:
A highly reliable semiconductor device is provided. The semiconductor device includes a first insulator; a first oxide provided over the first insulator; a second oxide provided over the first oxide; a first conductor and a second conductor provided apart from each other over the second oxide; a third oxide provided over the second oxide, the first conductor, and the second conductor; a second insulating film provided over the third oxide; and a third conductor provided over the second oxide with the third oxide and the second insulating film positioned therebetween. The third oxide contains a metal element and nitrogen, and the metal element is bonded to nitrogen.
公开/授权文献
信息查询
IPC分类: