- 专利标题: Wrap around contact process margin improvement with early contact cut
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申请号: US16797020申请日: 2020-02-21
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公开(公告)号: US11227923B2公开(公告)日: 2022-01-18
- 发明人: Ruilong Xie , Veeraraghavan S. Basker , Andrew Greene , Alexander Reznicek , Yao Yao
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 Jeffrey S LaBaw
- 主分类号: H01L29/417
- IPC分类号: H01L29/417 ; H01L29/40 ; H01L29/66 ; H01L29/78
摘要:
A method is presented for forming a wrap around contact. The method includes forming a p-type epitaxial region and an n-type epitaxial region over a substrate, forming a dielectric pillar between the p-type epitaxial region and the n-type epitaxial region, depositing sacrificial liners around both the p-type epitaxial region and the n-type epitaxial region, and depositing an inter-layer dielectric (ILD). The method further includes forming trenches in the ILD extending into the sacrificial liners, wherein the trenches are vertically aligned with the p-type epitaxial region and the n-type epitaxial region, removing the sacrificial liners to define irregular-shaped openings exposing the p-type epitaxial region and the n-type epitaxial region, and filling the irregular-shaped openings with a conductive material defining the wrap around contact.
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