Invention Grant
- Patent Title: Integrated structures including material containing silicon, nitrogen, and at least one of carbon, oxygen, boron and phosphorus
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Application No.: US16907967Application Date: 2020-06-22
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Publication No.: US11239252B2Publication Date: 2022-02-01
- Inventor: Justin B. Dorhout , Fei Wang , Chet E. Carter , Ian Laboriante , John D. Hopkins , Kunal Shrotri , Ryan Meyer , Vinayak Shamanna , Kunal R. Parekh , Martin C. Roberts , Matthew Park
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/11582 ; H01L27/1157 ; H01L23/528 ; H01L23/532

Abstract:
Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. A layer over the conductive levels includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus. In some embodiments the vertically-stacked conductive levels are wordline levels within a NAND memory array. Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. Vertically-stacked NAND memory cells are along the conductive levels within a memory array region. A staircase region is proximate the memory array region. The staircase region has electrical contacts in one-to-one correspondence with the conductive levels. A layer is over the memory array region and over the staircase region. The layer includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus.
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Information query
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