Invention Grant
- Patent Title: Integrated chip and method of forming thereof
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Application No.: US16217405Application Date: 2018-12-12
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Publication No.: US11239313B2Publication Date: 2022-02-01
- Inventor: Meng-Han Lin , Yong-Shiuan Tsair
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/112
- IPC: H01L27/112 ; H01L29/06 ; H01L21/762 ; H01L29/66 ; H01L29/10 ; H01L21/8238 ; H01L29/423 ; H01L27/092 ; H01L29/08

Abstract:
An integrated chip comprises a substrate, an isolation structure and a gate structure. The isolation structure comprises one or more dielectric materials within the substrate and has sidewalls defining an active region in the substrate. The active region has a channel region, a source region, and a drain region separated from the source region by the channel region along a first direction. The source, drain and channel regions respectively have first, second and third widths along a second direction perpendicular to the first direction. The third width is larger than the first and second widths. The gate structure comprises a first gate electrode region having a first composition of one or more materials and a second gate electrode region having a second composition of one or more materials different than the first composition of one or more materials.
Information query
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