Invention Grant
- Patent Title: Bond pad structure for bonding improvement
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Application No.: US16705376Application Date: 2019-12-06
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Publication No.: US11244981B2Publication Date: 2022-02-08
- Inventor: Sin-Yao Huang , Ching-Chun Wang , Dun-Nian Yaung , Feng-Chi Hung , Ming-Tsong Wang , Shih Pei Chou
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
Some embodiments relate an integrated circuit (IC). The IC includes a first substrate including an array of photodetectors, wherein a bond pad opening extends through the first substrate and is defined by an inner sidewall of the first substrate. An interconnect structure is disposed over the first substrate and includes a plurality of metal layers stacked over one another and disposed within a dielectric structure. The bond pad opening further extends through at least a portion of the interconnect structure and is further defined by an inner sidewall of the interconnect structure. A bond pad structure directly contacts a metal layer of the plurality of metal layers in the interconnect structure and is located at an uppermost extent of the bond pad opening.
Public/Granted literature
- US20200152675A1 BOND PAD STRUCTURE FOR BONDING IMPROVEMENT Public/Granted day:2020-05-14
Information query
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