发明授权
- 专利标题: Wafer level package
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申请号: US16869988申请日: 2020-05-08
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公开(公告)号: US11264354B2公开(公告)日: 2022-03-01
- 发明人: Jinwoo Park , Jungho Park , Dahye Kim , Minjun Bae
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2019-0124772 20191008
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L25/065 ; H01L23/31
摘要:
Provided are a wafer level package and a method of manufacturing the same, wherein an underfill sufficiently fills a space between a redistribution substrate and a semiconductor chip, thereby reducing warpage. The wafer level package includes a redistribution substrate including at least one redistribution layer (RDL), a semiconductor chip on the redistribution substrate, and an underfill filling a space between the redistribution substrate and the semiconductor chip. The underfill covers side surfaces of the semiconductor chip. The redistribution substrate includes a trench having a line shape and extending in a first direction along a first side surface of the semiconductor chip.
公开/授权文献
- US20210104489A1 WAFER LEVEL PACKAGE 公开/授权日:2021-04-08
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